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Highly Deep Ultraviolet–Transparent h-BN Film Deposited on an Al(0.7)Ga(0.3)N Template by Low-Temperature Radio-Frequency Sputtering

Hexagonal boron nitride (h-BN) is an attractive wide-bandgap material for application to emitters and detectors operating in the deep ultraviolet (DUV) spectral region. The optical transmittance of h-BN in the DUV region is particularly important for these devices. We report on the deposition of thi...

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Detalles Bibliográficos
Autores principales:	Hao, Guo-Dong, Taniguchi, Manabu, Inoue, Shin-ichiro
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6947417/ https://www.ncbi.nlm.nih.gov/pubmed/31817335 http://dx.doi.org/10.3390/ma12244046

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