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Forward Voltage Drop Induced by an Abnormal Threading Dislocation Aggregation in 4H-SiC GTO Devices

An abnormal star-like defect was found on the failed SiC gate turn-off thyristor (GTO) devices after metal removal and KOH etching at 450 °C in this work. It is of extraordinary larger size of 210–580 µm, even much larger than the etch pit of a micropipe in 4H-SiC. In addition, the abnormal star-lik...

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Detalles Bibliográficos
Autores principales: Cui, Yingxin, Dong, Peng, Chen, Zhe, Li, Zhiqiang, Li, Lianghui, Li, Juntao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6947509/
https://www.ncbi.nlm.nih.gov/pubmed/31817311
http://dx.doi.org/10.3390/ma12244042