Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for cryogenic). Under cryogenic conditions, the precursor material c...

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Detalles Bibliográficos
Autores principales: De Teresa, José María, Orús, Pablo, Córdoba, Rosa, Philipp, Patrick
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6952801/
https://www.ncbi.nlm.nih.gov/pubmed/31766480
http://dx.doi.org/10.3390/mi10120799

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6952801/
https://www.ncbi.nlm.nih.gov/pubmed/31766480
http://dx.doi.org/10.3390/mi10120799

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