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Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions

In this contribution, we compare the performance of Focused Electron Beam-induced Deposition (FEBID) and Focused Ion Beam-induced Deposition (FIBID) at room temperature and under cryogenic conditions (the prefix “Cryo” is used here for cryogenic). Under cryogenic conditions, the precursor material c...

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Detalles Bibliográficos
Autores principales:	De Teresa, José María, Orús, Pablo, Córdoba, Rosa, Philipp, Patrick
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6952801/ https://www.ncbi.nlm.nih.gov/pubmed/31766480 http://dx.doi.org/10.3390/mi10120799

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