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Investigation of the Pd Nanoparticles-Assisted Chemical Etching of Silicon for Ethanol Solution Electrooxidation
The formation of porous silicon by Pd nanoparticles-assisted chemical etching of single-crystal Si with resistivity ρ = 0.01 Ω·cm at 25 °C, 50 °C and 75 °C in HF/H(2)O(2)/H(2)O solution was studied. Porous layers of silicon were studied by optical and scanning electron microscopy, and gravimetric an...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6952961/ https://www.ncbi.nlm.nih.gov/pubmed/31842302 http://dx.doi.org/10.3390/mi10120872 |