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Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present se...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6953100/ https://www.ncbi.nlm.nih.gov/pubmed/31801198 http://dx.doi.org/10.3390/mi10120834 |