CMOS Image Sensors and Plasma Processes: How PMD Nitride Charging Acts on the Dark Current

Plasma processes are known to be prone to inducing damage by charging effects. For CMOS image sensors, this can lead to dark current degradation both in value and uniformity. An in-depth analysis, motivated by the different degrading behavior of two different plasma processes, has been performed in...

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Detalles Bibliográficos
Autores principales: Sacchettini, Yolène, Carrère, Jean-Pierre, Duru, Romain, Oddou, Jean-Pierre, Goiffon, Vincent, Magnan, Pierre
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6960528/
https://www.ncbi.nlm.nih.gov/pubmed/31847408
http://dx.doi.org/10.3390/s19245534

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6960528/
https://www.ncbi.nlm.nih.gov/pubmed/31847408
http://dx.doi.org/10.3390/s19245534

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