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CMOS Image Sensors and Plasma Processes: How PMD Nitride Charging Acts on the Dark Current
Plasma processes are known to be prone to inducing damage by charging effects. For CMOS image sensors, this can lead to dark current degradation both in value and uniformity. An in-depth analysis, motivated by the different degrading behavior of two different plasma processes, has been performed in...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6960528/ https://www.ncbi.nlm.nih.gov/pubmed/31847408 http://dx.doi.org/10.3390/s19245534 |