Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations

Finite element simulations for detecting the dielectric permittivity of planar nanoscale dielectrics by electrostatic probe are performed to explore the microprobe technology of characterizing nanomaterials. The electrostatic force produced by the polarization of nanoscale dielectrics is analyzed by...

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Detalles Bibliográficos
Autores principales: Ren, He, Sun, Wei-Feng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6960583/
https://www.ncbi.nlm.nih.gov/pubmed/31817944
http://dx.doi.org/10.3390/s19245405

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6960583/
https://www.ncbi.nlm.nih.gov/pubmed/31817944
http://dx.doi.org/10.3390/s19245405

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