Dual-Level Capacitive Micromachined Uncooled Thermal Detector

This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance...

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Detalles Bibliográficos
Autores principales: Tawfik, Hani H., Allidina, Karim, Nabki, Frederic, El-Gamal, Mourad N.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961019/
https://www.ncbi.nlm.nih.gov/pubmed/31835469
http://dx.doi.org/10.3390/s19245434

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961019/
https://www.ncbi.nlm.nih.gov/pubmed/31835469
http://dx.doi.org/10.3390/s19245434

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