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Dual-Level Capacitive Micromachined Uncooled Thermal Detector

This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance...

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Detalles Bibliográficos
Autores principales:	Tawfik, Hani H., Allidina, Karim, Nabki, Frederic, El-Gamal, Mourad N.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961019/ https://www.ncbi.nlm.nih.gov/pubmed/31835469 http://dx.doi.org/10.3390/s19245434

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