Effect of Palladium Electrode Patterns on Hydrogen Response Characteristics from a Sensor Based on Ta(2)O(5) Film on SiC at High Temperatures

Our study aims to fabricate a hydrogen sensor based on thermal stability analysis of Ta(2)O(5) film, and to determine the effect of Pd electrodes on the hydrogen sensor at high temperatures. First, in order to ensure high-temperature stability of silicon carbide (SiC)-based hydrogen sensors, the the...

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Detalles Bibliográficos
Autores principales: Choi, Kyeong-Keun, Kim, Seongjeen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961022/
https://www.ncbi.nlm.nih.gov/pubmed/31842347
http://dx.doi.org/10.3390/s19245478

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961022/
https://www.ncbi.nlm.nih.gov/pubmed/31842347
http://dx.doi.org/10.3390/s19245478

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