Cargando…
Effect of Palladium Electrode Patterns on Hydrogen Response Characteristics from a Sensor Based on Ta(2)O(5) Film on SiC at High Temperatures
Our study aims to fabricate a hydrogen sensor based on thermal stability analysis of Ta(2)O(5) film, and to determine the effect of Pd electrodes on the hydrogen sensor at high temperatures. First, in order to ensure high-temperature stability of silicon carbide (SiC)-based hydrogen sensors, the the...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6961022/ https://www.ncbi.nlm.nih.gov/pubmed/31842347 http://dx.doi.org/10.3390/s19245478 |