Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

Solution-processed metal oxides require a great deal of thermal budget in order to achieve the desired film properties. Here, we show that the deposition temperature of sprayed zirconium oxide (ZrO(x)) thin film can be lowered by exposing the film surface to an ultraviolet (UV) ozone treatment at ro...

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Detalles Bibliográficos
Autores principales: Oluwabi, Abayomi Titilope, Gaspar, Diana, Katerski, Atanas, Mere, Arvo, Krunks, Malle, Pereira, Luis, Oja Acik, Ilona
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6981653/
https://www.ncbi.nlm.nih.gov/pubmed/31861357
http://dx.doi.org/10.3390/ma13010006

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6981653/
https://www.ncbi.nlm.nih.gov/pubmed/31861357
http://dx.doi.org/10.3390/ma13010006

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