Atomic Layer Deposition of GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3)

Thin films of the catalytically interesting ternary and quaternary perovskites GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3) are fabricated by atomic layer deposition using metal β-diketonates and ozone as precursors. The resulting thin films are amorphous as deposited and become single-oriented crystalline on...

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Detalles Bibliográficos
Autores principales: Duparc, Marion, Sønsteby, Henrik Hovde, Nilsen, Ola, Sjåstad, Anja Olafsen, Fjellvåg, Helmer
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982051/
https://www.ncbi.nlm.nih.gov/pubmed/31861587
http://dx.doi.org/10.3390/ma13010024

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982051/
https://www.ncbi.nlm.nih.gov/pubmed/31861587
http://dx.doi.org/10.3390/ma13010024

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