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Atomic Layer Deposition of GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3)

Thin films of the catalytically interesting ternary and quaternary perovskites GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3) are fabricated by atomic layer deposition using metal β-diketonates and ozone as precursors. The resulting thin films are amorphous as deposited and become single-oriented crystalline on...

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Detalles Bibliográficos
Autores principales:	Duparc, Marion, Sønsteby, Henrik Hovde, Nilsen, Ola, Sjåstad, Anja Olafsen, Fjellvåg, Helmer
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982051/ https://www.ncbi.nlm.nih.gov/pubmed/31861587 http://dx.doi.org/10.3390/ma13010024

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