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Atomic Layer Deposition of GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3)
Thin films of the catalytically interesting ternary and quaternary perovskites GdCoO(3) and Gd(0.9)Ca(0.1)CoO(3) are fabricated by atomic layer deposition using metal β-diketonates and ozone as precursors. The resulting thin films are amorphous as deposited and become single-oriented crystalline on...
Asıl Yazarlar: | , , , , |
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Materyal Türü: | Online Makale Metin |
Dil: | English |
Baskı/Yayın Bilgisi: |
MDPI
2019
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Konular: | |
Online Erişim: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982051/ https://www.ncbi.nlm.nih.gov/pubmed/31861587 http://dx.doi.org/10.3390/ma13010024 |