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A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers
The EM- [Formula: see text] (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM- [Formula: see text] loop an intric...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982865/ https://www.ncbi.nlm.nih.gov/pubmed/31877890 http://dx.doi.org/10.3390/s20010091 |