A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers

The EM- [Formula: see text] (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM- [Formula: see text] loop an intric...

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Detalles Bibliográficos
Autores principales: Chen, Dongliang, Yin, Liang, Fu, Qiang, Zhang, Wenbo, Wang, Yihang, Zhang, Guorui, Zhang, Yufeng, Liu, Xiaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982865/
https://www.ncbi.nlm.nih.gov/pubmed/31877890
http://dx.doi.org/10.3390/s20010091

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