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A High-Temperature, Low-Noise Readout ASIC for MEMS-Based Accelerometers
This paper presents the development and measurement results of a complementary metal oxide semiconductor (CMOS) readout application-specific integrated circuit (ASIC) for bulk-silicon microelectromechanical system (MEMS) accelerometers. The proposed ASIC converts the capacitance difference of the ME...
Autores principales: | Qi, Min, Guo, An-qiang, Qiao, Dong-hai |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982914/ https://www.ncbi.nlm.nih.gov/pubmed/31906194 http://dx.doi.org/10.3390/s20010241 |
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