Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm(2). Five hundred nm thick AlN film with stron...

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Detalles Bibliográficos
Autores principales: Yeo, Hong Goo, Jung, Joontaek, Sim, Minkyung, Jang, Jae Eun, Choi, Hongsoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982933/
https://www.ncbi.nlm.nih.gov/pubmed/31935913
http://dx.doi.org/10.3390/s20010315

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6982933/
https://www.ncbi.nlm.nih.gov/pubmed/31935913
http://dx.doi.org/10.3390/s20010315

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