Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO(3)/Si Microring Resonator

Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO(3)) using a complementary metal-oxide-semiconductor (CMOS)-compat...

Descripción completa

Detalles Bibliográficos
Autores principales: Matsuura, Sosuke, Yamasaku, Naoki, Nishijima, Yoshiaki, Okazaki, Shinji, Arakawa, Taro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6983085/
https://www.ncbi.nlm.nih.gov/pubmed/31877934
http://dx.doi.org/10.3390/s20010096

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6983085/
https://www.ncbi.nlm.nih.gov/pubmed/31877934
http://dx.doi.org/10.3390/s20010096

Ejemplares similares