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Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO(3)/Si Microring Resonator
Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO(3)) using a complementary metal-oxide-semiconductor (CMOS)-compat...
Autores principales: | Matsuura, Sosuke, Yamasaku, Naoki, Nishijima, Yoshiaki, Okazaki, Shinji, Arakawa, Taro |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6983085/ https://www.ncbi.nlm.nih.gov/pubmed/31877934 http://dx.doi.org/10.3390/s20010096 |
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