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Hillock assisted p-type enhancement in N-polar GaN:Mg films grown by MOCVD
We report on the enhanced incorporation efficiency of magnesium dopants into facets of hexagonal hillock structures in N-polar GaN, studied by comparative analysis of GaN:Mg films grown by MOCVD on high and low hillock density GaN template layers. Total magnesium concentration in planar regions surr...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6989458/ https://www.ncbi.nlm.nih.gov/pubmed/31996741 http://dx.doi.org/10.1038/s41598-020-58275-1 |