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Error Analysis and Modeling for an Absolute Capacitive Displacement Measuring System with High Accuracy and Long Range
We proposed a novel kind of absolute capacitive grating displacement measuring system with both high accuracy and long range in a previous article. The measuring system includes both a MOVER and a STATOR, the contact surfaces of which are coated by a thin layer of dielectric film with a low friction...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6994968/ https://www.ncbi.nlm.nih.gov/pubmed/31817131 http://dx.doi.org/10.3390/s19245339 |