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Comparison of AlN vs. SIO(2)/LiNbO(3) Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects
We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO(2))/lithium niobate (LiNbO(3)) membranes that are char...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7014363/ https://www.ncbi.nlm.nih.gov/pubmed/31947572 http://dx.doi.org/10.3390/s20020464 |