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Comparison of AlN vs. SIO(2)/LiNbO(3) Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO(2))/lithium niobate (LiNbO(3)) membranes that are char...

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Detalles Bibliográficos
Autores principales:	Yu. Shevchenko, Sergey, A. Mikhailenko, Denis, Markelov, Oleg A.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7014363/ https://www.ncbi.nlm.nih.gov/pubmed/31947572 http://dx.doi.org/10.3390/s20020464

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