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Conformal smoothing of mid-spatial frequency surface error for nano-accuracy Continuous Phase Plates (CPP)
This paper presented a conformal smoothing theory, and smoothing capability evaluation was established on the proposed theory. According to pressure distribution model, processing parameters have been optimized and the CPP sample with a size of 340 × 340 mm was applied in conformal smoothing. The mi...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7018739/ https://www.ncbi.nlm.nih.gov/pubmed/32054930 http://dx.doi.org/10.1038/s41598-020-59484-4 |