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Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces th...

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Detalles Bibliográficos
Autores principales: Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Sulaiman, Othman Bin, Dong, Bowei, Lee, Chengkuo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019281/
https://www.ncbi.nlm.nih.gov/pubmed/31861476
http://dx.doi.org/10.3390/mi11010007