A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D...

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Detalles Bibliográficos
Autores principales: Chen, Xiaoyu, Xia, Yuyu, Mao, Yifei, Huang, Yun, Zhu, Jia, Xu, Jun, Zhu, Rui, Shi, Lei, Wu, Wengang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019797/
https://www.ncbi.nlm.nih.gov/pubmed/31963142
http://dx.doi.org/10.3390/mi11010095

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019797/
https://www.ncbi.nlm.nih.gov/pubmed/31963142
http://dx.doi.org/10.3390/mi11010095

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