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Vertical Leakage in GaN-on-Si Stacks Investigated by a Buffer Decomposition Experiment
We investigated the origin of vertical leakage and breakdown in GaN-on-Si epitaxial structures. In order to understand the role of the nucleation layer, AlGaN buffer, and C-doped GaN, we designed a sequential growth experiment. Specifically, we analyzed three different structures grown on silicon su...
Autores principales: | , , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019869/ https://www.ncbi.nlm.nih.gov/pubmed/31963553 http://dx.doi.org/10.3390/mi11010101 |