Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing

This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton...

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Detalles Bibliográficos
Autores principales: Li, Lei, Zhang, Yin-ping, Ma, Chi-cheng, Liu, Can-chang, Peng, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020076/
https://www.ncbi.nlm.nih.gov/pubmed/31861694
http://dx.doi.org/10.3390/mi11010012

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020076/
https://www.ncbi.nlm.nih.gov/pubmed/31861694
http://dx.doi.org/10.3390/mi11010012

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