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Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing

This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton...

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Detalles Bibliográficos
Autores principales: Li, Lei, Zhang, Yin-ping, Ma, Chi-cheng, Liu, Can-chang, Peng, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020076/
https://www.ncbi.nlm.nih.gov/pubmed/31861694
http://dx.doi.org/10.3390/mi11010012
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author Li, Lei
Zhang, Yin-ping
Ma, Chi-cheng
Liu, Can-chang
Peng, Bo
author_facet Li, Lei
Zhang, Yin-ping
Ma, Chi-cheng
Liu, Can-chang
Peng, Bo
author_sort Li, Lei
collection PubMed
description This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton’s principle and Galerkin method. Static analysis is introduced to investigate the effect of added mass on the natural frequency of the resonant sensor. Then, the perturbation method is applied to determine the response and stability of the system for small amplitude vibration. Through bifurcation analysis, the physical conditions of the anti-symmetric mode vibration are obtained. The corresponding stability analysis is carried out. Results show that the added mass can change the bifurcation behaviors of the anti-symmetric mode and affect the voltage and frequency of the bifurcation jump point. Typically, we propose a mass parameter identification method based on the dynamic jump motion of the anti-symmetric mode. Numerical studies are introduced to verify the validity of mass detection method. Finally, the influence of physical parameters on the sensitivity of mass sensor is analyzed. It is found that the DC voltage and mass adsorption position are critical to the sensitivity of the sensor. The results of this paper can be potentially useful in nonlinear mass sensors.
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spelling pubmed-70200762020-03-09 Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing Li, Lei Zhang, Yin-ping Ma, Chi-cheng Liu, Can-chang Peng, Bo Micromachines (Basel) Article This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton’s principle and Galerkin method. Static analysis is introduced to investigate the effect of added mass on the natural frequency of the resonant sensor. Then, the perturbation method is applied to determine the response and stability of the system for small amplitude vibration. Through bifurcation analysis, the physical conditions of the anti-symmetric mode vibration are obtained. The corresponding stability analysis is carried out. Results show that the added mass can change the bifurcation behaviors of the anti-symmetric mode and affect the voltage and frequency of the bifurcation jump point. Typically, we propose a mass parameter identification method based on the dynamic jump motion of the anti-symmetric mode. Numerical studies are introduced to verify the validity of mass detection method. Finally, the influence of physical parameters on the sensitivity of mass sensor is analyzed. It is found that the DC voltage and mass adsorption position are critical to the sensitivity of the sensor. The results of this paper can be potentially useful in nonlinear mass sensors. MDPI 2019-12-19 /pmc/articles/PMC7020076/ /pubmed/31861694 http://dx.doi.org/10.3390/mi11010012 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Lei
Zhang, Yin-ping
Ma, Chi-cheng
Liu, Can-chang
Peng, Bo
Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title_full Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title_fullStr Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title_full_unstemmed Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title_short Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
title_sort anti-symmetric mode vibration of electrostatically actuated clamped–clamped microbeams for mass sensing
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7020076/
https://www.ncbi.nlm.nih.gov/pubmed/31861694
http://dx.doi.org/10.3390/mi11010012
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