Spatially Resolved Optoelectronic Properties of Al-Doped Zinc Oxide Thin Films Deposited by Radio-Frequency Magnetron Plasma Sputtering Without Substrate Heating

Transparent and conducting thin films were deposited on soda lime glass by RF magnetron sputtering without intentional substrate heating using an aluminum doped zinc oxide target of 2 inch in diameter. The sheet resistance, film thickness, resistivity, averaged transmittance and energy band gaps wer...

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Detalles Bibliográficos
Autor principal: Stamate, Eugen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7022739/
https://www.ncbi.nlm.nih.gov/pubmed/31861533
http://dx.doi.org/10.3390/nano10010014

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7022739/
https://www.ncbi.nlm.nih.gov/pubmed/31861533
http://dx.doi.org/10.3390/nano10010014

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