Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor

Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based a...

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Detalles Bibliográficos
Autores principales: Xu, Feng, Wei, Yuliang, Bian, Shiyuan, Wang, Huanqin, Chen, Da-Ren, Kong, Deyi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7037910/
https://www.ncbi.nlm.nih.gov/pubmed/31979192
http://dx.doi.org/10.3390/s20030626

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7037910/
https://www.ncbi.nlm.nih.gov/pubmed/31979192
http://dx.doi.org/10.3390/s20030626

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