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Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor
Micro-Cantilever (MCL) is a thin film structure that is applied for aerosol particle mass sensing. Several modifications to the rectangular MCL (length-to-width ratio, slots at the anchor, serrations at its side edges) are made to deduce the role and influence of the shape of rectangular MCL-based a...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7037910/ https://www.ncbi.nlm.nih.gov/pubmed/31979192 http://dx.doi.org/10.3390/s20030626 |