Performance improvement in electrospun InGaZnO nanofibres field-effect-transistors using low thermal budget microwave calcination and Ar/O(2) mixed-plasma surface treatment

In this study, we present a low thermal budget microwave annealing (MWA) method for calcination of electrospun In-Ga-ZnO (IGZO) nanofibres and demonstrate an improvement in the performance of IGZO nanofibre field-effect transistors (FETs) by Ar/O(2) mixed-plasma surface treatment. The IGZO nanofibre...

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Detalles Bibliográficos
Autores principales: Cho, Seong-Kun, Cho, Won-Ju
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7046654/
https://www.ncbi.nlm.nih.gov/pubmed/32108173
http://dx.doi.org/10.1038/s41598-020-60637-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7046654/
https://www.ncbi.nlm.nih.gov/pubmed/32108173
http://dx.doi.org/10.1038/s41598-020-60637-8

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