MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above...

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Detalles Bibliográficos
Autores principales: Nguyen, Thanh-Vinh, Mizuki, Yuya, Tsukagoshi, Takuya, Takahata, Tomoyuki, Ichiki, Masaaki, Shimoyama, Isao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7070847/
https://www.ncbi.nlm.nih.gov/pubmed/32075243
http://dx.doi.org/10.3390/s20041052

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7070847/
https://www.ncbi.nlm.nih.gov/pubmed/32075243
http://dx.doi.org/10.3390/s20041052

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