Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory

Magnetoelectric sensors provide the ability to measure magnetic fields down to the pico tesla range and are currently the subject of intense research. Such sensors usually combine a piezoelectric and a magnetostrictive material, so that magnetically induced stresses can be measured electrically. Sca...

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Detalles Bibliográficos
Autores principales: Krey, Maximilian, Hähnlein, Bernd, Tonisch, Katja, Krischok, Stefan, Töpfer, Hannes
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7071012/
https://www.ncbi.nlm.nih.gov/pubmed/32069884
http://dx.doi.org/10.3390/s20041001

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7071012/
https://www.ncbi.nlm.nih.gov/pubmed/32069884
http://dx.doi.org/10.3390/s20041001

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