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Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression
As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-c...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7073545/ https://www.ncbi.nlm.nih.gov/pubmed/31973144 http://dx.doi.org/10.3390/mi11020119 |