Fully-Differential TPoS Resonators Based on Dual Interdigital Electrodes for Feedthrough Suppression

As one of the core components of MEMS (i.e., micro-electro-mechanical systems), thin-film piezoelectric-on-silicon (TPoS) resonators experienced a blooming development in the past decades due to unique features such as a remarkable capability of integration for attractive applications of system-on-c...

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Detalles Bibliográficos
Autores principales: Zhang, Yi, Bao, Jing-Fu, Li, Xin-Yi, Zhou, Xin, Wu, Zhao-Hui, Zhang, Xiao-Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7073545/
https://www.ncbi.nlm.nih.gov/pubmed/31973144
http://dx.doi.org/10.3390/mi11020119

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7073545/
https://www.ncbi.nlm.nih.gov/pubmed/31973144
http://dx.doi.org/10.3390/mi11020119

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