A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production

In this paper, we present a novel thermoresistive gas flow sensor with a high-yield and low-cost volume production by using front-side microfabricated technology. To best improve the thermal resistance, a micro-air-trench between the heater and the thermistors was opened to minimize the heat loss fr...

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Detalles Bibliográficos
Autores principales: Xue, Dan, Wang, Jiachou, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074595/
https://www.ncbi.nlm.nih.gov/pubmed/32079170
http://dx.doi.org/10.3390/mi11020205

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074595/
https://www.ncbi.nlm.nih.gov/pubmed/32079170
http://dx.doi.org/10.3390/mi11020205

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