Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage

Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been limited due to the...

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Detalles Bibliográficos
Autores principales: Li, Hao, Ruan, Yong, You, Zheng, Song, Zhiqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074599/
https://www.ncbi.nlm.nih.gov/pubmed/32046054
http://dx.doi.org/10.3390/mi11020171

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074599/
https://www.ncbi.nlm.nih.gov/pubmed/32046054
http://dx.doi.org/10.3390/mi11020171

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