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Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been limited due to the...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074599/ https://www.ncbi.nlm.nih.gov/pubmed/32046054 http://dx.doi.org/10.3390/mi11020171 |