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μ-Coriolis Mass Flow Sensor with Resistive Readout
This paper presents a [Formula: see text]-Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows for actuation at much higher amplitudes t...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074603/ https://www.ncbi.nlm.nih.gov/pubmed/32053956 http://dx.doi.org/10.3390/mi11020184 |