Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteri...

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Detalles Bibliográficos
Autores principales: Hart, Cacie, Rajaraman, Swaminathan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074666/
https://www.ncbi.nlm.nih.gov/pubmed/32046367
http://dx.doi.org/10.3390/mi11020178

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074666/
https://www.ncbi.nlm.nih.gov/pubmed/32046367
http://dx.doi.org/10.3390/mi11020178

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