Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficie...

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Detalles Bibliográficos
Autores principales: Gablech, Imrich, Klempa, Jaroslav, Pekárek, Jan, Vyroubal, Petr, Hrabina, Jan, Holá, Miroslava, Kunz, Jan, Brodský, Jan, Neužil, Pavel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074684/
https://www.ncbi.nlm.nih.gov/pubmed/32012859
http://dx.doi.org/10.3390/mi11020143

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074684/
https://www.ncbi.nlm.nih.gov/pubmed/32012859
http://dx.doi.org/10.3390/mi11020143

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