3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix o...

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Detalles Bibliográficos
Autores principales: Shiba, Sabera Fahmida, Jeon, Hyeongmin, Kim, Jong-Soo, Kim, Jong-Eun, Kim, Jungkwun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074750/
https://www.ncbi.nlm.nih.gov/pubmed/32024035
http://dx.doi.org/10.3390/mi11020157

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7074750/
https://www.ncbi.nlm.nih.gov/pubmed/32024035
http://dx.doi.org/10.3390/mi11020157

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