Enhanced Electrode Deposition for On-Chip Integrated Micro-Supercapacitors by Controlled Surface Roughening

[Image: see text] On-chip micro-supercapacitors (MSCs), integrated with energy harvesters, hold substantial promise for developing self-powered wireless sensor systems. However, MSCs have conventionally been manufactured through techniques incompatible with semiconductor fabrication technology, the...

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Detalles Bibliográficos
Autores principales: Vyas, Agin, Wang, Kejian, Anderson, Alec, Velasco, Andres, Van den Eeckhoudt, Ruben, Haque, Mohammad Mazharul, Li, Qi, Smith, Anderson, Lundgren, Per, Enoksson, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7081403/
https://www.ncbi.nlm.nih.gov/pubmed/32201810
http://dx.doi.org/10.1021/acsomega.9b04266

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7081403/
https://www.ncbi.nlm.nih.gov/pubmed/32201810
http://dx.doi.org/10.1021/acsomega.9b04266

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