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A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
In this work, we investigate the use of high power impulse magnetron sputtering (HiPIMS) for the deposition of micrometer thick diamond like carbon (DLC) coatings on Si and steel substrates. The adhesion on both types of substrates is ensured with a simple Ti interlayer, while the energy of impingin...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7084500/ https://www.ncbi.nlm.nih.gov/pubmed/32110856 http://dx.doi.org/10.3390/ma13051038 |