A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

In this work, we investigate the use of high power impulse magnetron sputtering (HiPIMS) for the deposition of micrometer thick diamond like carbon (DLC) coatings on Si and steel substrates. The adhesion on both types of substrates is ensured with a simple Ti interlayer, while the energy of impingin...

Descripción completa

Detalles Bibliográficos
Autores principales: Vitelaru, Catalin, Parau, Anca Constantina, Constantin, Lidia Ruxandra, Kiss, Adrian Emil, Vladescu, Alina, Sobetkii, Arcadie, Kubart, Tomas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7084500/
https://www.ncbi.nlm.nih.gov/pubmed/32110856
http://dx.doi.org/10.3390/ma13051038

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7084500/
https://www.ncbi.nlm.nih.gov/pubmed/32110856
http://dx.doi.org/10.3390/ma13051038

Ejemplares similares